Industry Patents
Patent: 10025189
Lithography Process for the Encapsulation of Patterned Thin Film Coatings
(Click image for PDF of full patent)
| Patent Number: |
10025189 |
| Title: |
Lithography Process for the Encapsulation of Patterned Thin Film Coatings |
| Abstract: |
A single lithography process for multi-layer metal/dielectric coatings
using a series of developing, baking, and lifting steps to coat two or
more thin films without re-patterning that results in the encapsulation
and profile optimization of multi-spectral patterned thin film coatings
is disclosed.
|
| Country of Issue: |
US |
| First Named Inventor: |
Lovelady, Varghese |
| Assignee: |
Ocean Optics |
| Continuation or Divisional of: |
|
| International Classification: |
H01L 21/3105 |
| US Classification: |
G03F 7/168 |
| Issue Date: |
07-17-2018 |
| Filing Date: |
07-15-2016 |
| Application : |
15/210992 |
| Notes: |
|
| Link to Patent at freepatentsonline.com: |
10025189 at Freepatentsonline |
| Link to World Patent Family1: |
World Patent Family at European Patent Office |
| Link to Google Patents1: |
10025189 at Google Patents |
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after the patent has issued - they take a while to get new patents in their systems.
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